Elli-RSc (Reflectometer) > Spectroscopic Reflectometer & Transmittance

본문 바로가기
Product
Ellipso Technology
Spectroscopic Reflectometer & Transmittance

Elli-RSc (Reflectometer)

PAGE INFORMATION

DATE 19-09-04 17:21

본문

Spectroscopic Reflectometer System with Microspot and Large Size Sample Stage

a4ecdf8dc84e7ad303e2be25806511c5_1567585269_2785.jpga4ecdf8dc84e7ad303e2be25806511c5_1567585269_3375.jpga4ecdf8dc84e7ad303e2be25806511c5_1567585269_3821.jpg

 

Spectroscopic Reflectometer(SR), the industry standard teengology that enables one to measure thickness and optical constants of thin film, in real time with a very small spot size, is used for characterization of a variety of materials (e.g., dielectrics, semiconductors, organics, etc.). It can be quite usefully used to characterize large-size sample with patterns on it.




PERFORMANCE


   1.Wavelength range : 450 ~ 900 nm
   2. Spot size : 50 um, 30 um, 10 um
   3.Thickness range : 10 nm ~ 50 μm (depends on film type)
   4.Number of layer : Up to 3 layer (depends on film types)
   5.Throughput : < 1 sec. per point (depends on film types)
   6.Reproducibility : ±1 Å on 10 times measurement




REFLECTOMETER SYSTEM


   1.Light source : 100 W Halogen Lamp
   2.Microscope system : Revolving nosepiece, Reflection probe head adapter
   3.Beam spot size : 50 um, 30 um, 10 um
   4.Spectral range : 450 ~ 900 nm
   5.Spectrograph : CCD type
   6.Stage size : 140 mm x 130 mm
   7.Moving stage stroke : 100 mm x 100 mm




APPLICATION

a4ecdf8dc84e7ad303e2be25806511c5_1567585319_4903.gif




OPTION


   1.Thick film measurement system : thickness range 1.0 ~ 300 um (mFFT*)
   2.Beam spot size : 4.0 um
   3.Stage size : 200 x 200 mm^2, 300  x 300 mm^2 and others (ask for a customized stage size)
   4.Auto focusing system : Color CCD camera
   5.Anti-vibration table :
   6.Transmittance module :
   7.Moving stage stroke : 100 mm x 100 mm