Elli-μSE_OCD > Spectroscopic Ellipsometer | (주)엘립소테크놀러지

Elli-μSE_OCD

DATE 22-01-04 13:26

Micro-spot Spectroscopic Ellipsometer for Semiconductor OCD Application : Ellipso Technology has recently developed a spectroscopic ellipsometer

with the world's best spot size. AFM or NNISE can be mounted on this Elli-μSE_OCD and operated simultaneously. This micro-spot Spectroscopy

Ellipsometer equipped with the mapping module and the variable angle-of-incidence module for improved measurement precision,

is well suited for OCD measurement in semiconductor processes.

◈ Performance / System

Measurement mode	Rotating Compensator Ellipsometer (RCE)
Wavelength range	190 ~ 850 nm
Measurement speed	~ 3 s/sp
Spot size	≦20 μm
Measurement repeatability	δ△=0.05°, δψ=0.02°
Variable angle of incidence	Automatic : 65˚~ 80˚, 0.1˚
Sample alignment	Automatic adjustment of height and azimuthal angle, Manual tilt adjustment
Mapping	Automatic (X,Y,θ) control : 300 mm wafer
Matching equipment	AFM or NNISE

◈ Schematic Diagram

◈ Application

Semiconductor : OCD(of HAR) structure, Dielectrics

Display : OLED, Dielectrics

▣ Supported by : KIAT(Korea Institute for Advancement of Technology)