Elli-SEUN (Ellipsometer) > Spectroscopic Ellipsometer

Spectroscopic Ellipsometer(SE), the industry standard technology that enables one to accurately measure thickness and optical constants of thin film, simultaneously, is used for characterization of a variety of materials (e.g., dielectrics, semiconductors, organics, etc.) including AR coatings, OLED, and low(high)-materials.

◈ FEATURE

   1. Easy Operation & Fast Measurement

   2. High Reproducibility

   3. User-Friendly Operation

   4. Non-contact & Non-destructive

   5. Multi-Layer Measurement

   6.  Wide Spectral Range

◈ SPECIFICATION

   1. Measuring constants

      - Film thickness, n, k vs λ

   2. Thickness range

      - sub Å ~ 10 μm (depends on film type)

   3. Wavelength range

      - 240 ~ 1700 nm 

      - Option of Spectral Range : (Duv:193nm, IR:900nm~ 2,200nm)

   4. Throughput

      - Normal mode(~10 sec)

      - fast mode (1~3 sec) per point(depends on film type)

   5. Beam Spot-size

      - 1.5 mm  (Optional 100μm, 50 μm, 20 μm)

   6. Angle of incidence

      - 45°~90° (Step 5°, manual type)

   7. Number of layers

      - Up to ten(10) layers (depends on film type)

   8. Repeatability

      - (3σ) ±0.3 Å on 10 times measurement

   9. Application

      - Semiconductors, Display, Optical Coatings, Chemistry/Biology, Conductive Organics, Photovoltaics etc.

         Thickness of Dielectrics, Semiconductors, Polymers,

         Supporting Backside/Front side Reflections, 

         Very Thin Films, Very Thick Films

         Variable Substrates (Silicon, GaAs, , Al, Steel, Glass, Al2O3, PC, PET, Polymer films and Others)

   10. Providing features

      - Refractive Index, Extinction coefficient and optical band gap

      - Film density and composition, Material's dispersion function library

      - User defined models capability, Data import & export functions, -

      - Extendable library

◈ OPTION 

   1. Auto Mapping Stage (150 mm, 200 mm, 300 mm, Customized Size)

   2. Option of Spectral Range (UV: 193 nm ~ 1,050 nm), (IR:, 900nm~ 2,200nm)

   3. Micro Spot Option (100 μm, 50 μm, 25 μm)

   4. Auto Alignment System, Automated Variable Angle of Incidence (45°~ 90°)