Elli-AAL (Alignment Layer Measurement System) > Polarimeter

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Elli-AAL (Alignment Layer Measurement System)

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DATE 19-09-04 17:09

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Elli-AAL


This system provides the ellipsometric data which are accurate enough for the quantitative characterization of ultra-small optical anisotropy of alignment layer(AAL) like a rubbed PI surface.


The rubbed PI is optically modelled as a double layer consisted of a uniaxial surface layer and an isotropic bulk layer. Thickness of each layer, azimuth angle and tilt angle of optic axis, birefringence of the uniaxial surface layer, are determined.




The world's first product launched

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The world's first product launched


     -. Extremely Precise Measurement of Ultra Small Optical Anisotropy
     -. Free from Substrate Residual Anisotropy
     -. One Touch Measurement (Auto Tilt/Adjust, Auto Mapping)
     -. Easy to Use Analysis Software



Specification

Retardation (σ)0.002 nm
Optic Axis (σ)*
(Azimuth/Tilt Angles)
0.05~0.50°
Measurement Time12 s/pt
Wavelength450 nm
Spot Size (D)~4.0 mm
X-Y-Z TranslationAuto (0.4 um)
Mapping Area100 x 100 mm2
Sample Tilt AdjustAuto (0.001°)
* depends on Retardation




Result of a Rubbed PI on Glass

point03.gif A Typical Ellipsometric Response & Best Fit Model Parameters of a Rubbed PI Sample 


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Uniaxial Surface LayerRetardation = 0.148 nmΔn = 0.0029d = 50.97 nm
Tilt Angle= 5.57°Azimuth Angle = 28.8°
Isotropic Bulk Layern = 1.7094d = 44.32 nm



point03.gif Measured (α,β) Compared with Simulated ones (Tilt Angle is Varied)

  a4ecdf8dc84e7ad303e2be25806511c5_1567584705_1393.jpga4ecdf8dc84e7ad303e2be25806511c5_1567584705_1938.jpg



point03.gif Measured (α,β) Compared with Simulated ones (Tilt Angle is Varied)

 a4ecdf8dc84e7ad303e2be25806511c5_1567584717_5358.jpga4ecdf8dc84e7ad303e2be25806511c5_1567584717_5921.jpg



APPLICATION

Measurement and Evaluation of Optical Anisotropy of Alignment Layers(Rubbed PIs, Photo Aligned Layers etc)
 



References

M.S. Park et al. "Quantitative Characterization of Uniaxial Anisotropy of Rubbed Polyimide Alignment Layer Using Reflection Ellipsometry," The 22nd International Display Workshops, Otsu, Japan, Dec. 9-11 (2015). 
M.S. Park et al. "Characterization of Anisotropy Profile of Rubbed Polyimide Alignment Layer Using Reflection Ellipsometry," Digest of Teengical Papers of IMID 2015, EXCO, Daegu, Korea, Aug. 18-21 (2015). 
S.Y. Kim et al. "Evaluation of Alignment Layer Based on Ultra Small Optical Anisotropy Measurement," Summer Meeting of Optical Society of Korea, 381-382 (2015). 


J.H. Lee et al. "Precise Measurement of Ultra Small Anisotropy of Rubbed Polyimide Using an Improved Reflection Ellipsometer," Digest of Teengical Papers of IMID 2014, KINTEX, Seoul, (2014).


J.H. Lee et al. "Precise Measurement of Ultra Small Optical Anisotropy of Rubbed Polyimide Using an Improved Reflection Ellipsometer", J. Korean Opt. and Photonics, 26(4) 195-20ㅁ2 (2015). 


S.Y. Kim "Ellipsometric Expressions for a Sample Coated with Uniaxially Anisotropic Layers," J. Korean Opt. & Photonics, 26(5) 275-282 (2015).


K.H. Lyum et al. "Study on Ultra-Small Optical Anisotropy Profile of Rubbed Polyimide Film by Using Transmission Ellipsometry," J. Opt. Soc. Korea, 18(2) 156-161 (2014).