Elli-AAL (Alignment Layer Measurement System)
PAGE INFORMATION
DATE 19-09-04 17:09본문
◈Elli-AAL
This system provides the ellipsometric data which are accurate enough for the quantitative characterization of ultra-small optical anisotropy of alignment layer(AAL) like a rubbed PI surface.
The rubbed PI is optically modelled as a double layer consisted of a uniaxial surface layer and an isotropic bulk layer. Thickness of each layer, azimuth angle and tilt angle of optic axis, birefringence of the uniaxial surface layer, are determined.
◈The world's first product launched
◈The world's first product launched
-. Extremely Precise Measurement of Ultra Small Optical Anisotropy
-. Free from Substrate Residual Anisotropy
-. One Touch Measurement (Auto Tilt/Adjust, Auto Mapping)
-. Easy to Use Analysis Software
◈Specification
Retardation (σ) | 0.002 nm |
Optic Axis (σ)* (Azimuth/Tilt Angles) | 0.05~0.50° |
Measurement Time | 12 s/pt |
Wavelength | 450 nm |
Spot Size (D) | ~4.0 mm |
X-Y-Z Translation | Auto (0.4 um) |
Mapping Area | 100 x 100 mm2 |
Sample Tilt Adjust | Auto (0.001°) |
* depends on Retardation |
◈Result of a Rubbed PI on Glass
A Typical Ellipsometric Response & Best Fit Model Parameters of a Rubbed PI Sample
Uniaxial Surface Layer | Retardation = 0.148 nm | Δn = 0.0029 | d = 50.97 nm |
Tilt Angle= 5.57° | Azimuth Angle = 28.8° | ||
Isotropic Bulk Layer | n = 1.7094 | d = 44.32 nm |
Measured (α,β) Compared with Simulated ones (Tilt Angle is Varied)
Measured (α,β) Compared with Simulated ones (Tilt Angle is Varied)
◈APPLICATION
Measurement and Evaluation of Optical Anisotropy of Alignment Layers(Rubbed PIs, Photo Aligned Layers etc)
◈References
M.S. Park et al. "Quantitative Characterization of Uniaxial Anisotropy of Rubbed Polyimide Alignment Layer Using Reflection Ellipsometry," The 22nd International Display Workshops, Otsu, Japan, Dec. 9-11 (2015).
M.S. Park et al. "Characterization of Anisotropy Profile of Rubbed Polyimide Alignment Layer Using Reflection Ellipsometry," Digest of Teengical Papers of IMID 2015, EXCO, Daegu, Korea, Aug. 18-21 (2015).
S.Y. Kim et al. "Evaluation of Alignment Layer Based on Ultra Small Optical Anisotropy Measurement," Summer Meeting of Optical Society of Korea, 381-382 (2015).
J.H. Lee et al. "Precise Measurement of Ultra Small Anisotropy of Rubbed Polyimide Using an Improved Reflection Ellipsometer," Digest of Teengical Papers of IMID 2014, KINTEX, Seoul, (2014).
J.H. Lee et al. "Precise Measurement of Ultra Small Optical Anisotropy of Rubbed Polyimide Using an Improved Reflection Ellipsometer", J. Korean Opt. and Photonics, 26(4) 195-20ㅁ2 (2015).
S.Y. Kim "Ellipsometric Expressions for a Sample Coated with Uniaxially Anisotropic Layers," J. Korean Opt. & Photonics, 26(5) 275-282 (2015).
K.H. Lyum et al. "Study on Ultra-Small Optical Anisotropy Profile of Rubbed Polyimide Film by Using Transmission Ellipsometry," J. Opt. Soc. Korea, 18(2) 156-161 (2014).
- Elli-AAL_Catalog.pdf (2.3M) 32download | DATE : 2019-09-04 17:15:15